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发明名称
SHORISOCHI
摘要
申请公布号
JP2642450(B2)
申请公布日期
1997.08.20
申请号
JP19880263922
申请日期
1988.10.21
申请人
HITACHI SEISAKUSHO KK
发明人
AMADA HARUO
分类号
B05C5/00;B05C11/00;B05C11/08;H01L21/027;H01L21/205;H01L21/30;H01L21/31;H01L21/66;(IPC1-7):B05C5/00
主分类号
B05C5/00
代理机构
代理人
主权项
地址
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