| 发明名称 |
PLASMA TREATMENT APPARATUS AND METHOD IN WHICH A UNIFORM ELECTRIC FIELD IS INDUCED BY A DIELECTRIC WINDOW |
| 摘要 |
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| 申请公布号 |
EP0640244(B1) |
申请公布日期 |
1997.08.20 |
| 申请号 |
EP19930911270 |
申请日期 |
1993.05.13 |
| 申请人 |
LAM RESEARCH CORPORATION |
发明人 |
CHEN, CHING-HWA;LIU, DAVID;TRAN, DUC |
| 分类号 |
H05H1/46;C23C16/50;C23C16/507;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306 |
主分类号 |
H05H1/46 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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