| 摘要 |
<p>PURPOSE:To prevent harmful by-product from being generated by forcing gas or liquid into plasma from a passage outside a plasma generation region to forcibly eliminate plasma on the midway, decomposing organic halogenated compounds in the plasma, and quenching them after reaction. CONSTITUTION:A cylindrical pipe 2, gas feed nozzle 3, and RF coil 4 wound around the pipe 2 are provided, whereby plasma F is formed in the pipe 2, while organic halogenated compounds are fed into the formed plasma F through the nozzle 3, wherein an annular pipe 10 is provided on the midway of the pipe 2 so that gas or liquid is forced from the pipe 10 into the plasma F being formed in the pipe 2. As a result, plasma is forcibly eliminated in the midway so that, after the organic halogenated compounds are decomposed in the plasma, they are quenched, preventing thereby harmful by-products from being generated.</p> |
