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发明名称	HYOMENKURIININGUHOHO
摘要
申请公布号	JP2643899(B2)	申请公布日期	1997.08.20
申请号	JP19950047533	申请日期	1995.03.07
申请人	NIPPON DENKI KK	发明人	IWATA HIROSHI
分类号	C30B33/12;H01L21/203;H01L21/302;H01L21/3065;(IPC1-7):C30B33/12;H01L21/306	主分类号	C30B33/12
代理机构		代理人
主权项
地址

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