发明名称 |
Modular vacuum system for the treatment of disk-shaped workpieces |
摘要 |
Modular vacuum system includes functional units arranged in tandem to form two parallel transport paths which connect at one end of the system. Each unit includes a housing milled from a single block of metal having external walls, an internal wall, and side-by-side openings which align with side-by-side openings in an adjacent unit.
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申请公布号 |
US5658114(A) |
申请公布日期 |
1997.08.19 |
申请号 |
US19950388923 |
申请日期 |
1995.02.15 |
申请人 |
LEYBOLD AKTIENGESELLSCHAFT |
发明人 |
MAHLER, PETER |
分类号 |
C23C14/56;H01J37/32;H01L21/00;(IPC1-7):F16J12/00 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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