MANUFACTURING METHOD OF SURFACE PROCESSED SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To prevent generation of micro-crack by utilizing a wheel provided with an arc on the single or both shoulders of an outer periphery edge. SOLUTION: Single or both shoulders of the outer periphery of a wheel used in grinding are provided with R. Grinding is conducted so that a grinding direction may be reciprocative or a grinding trace may be fan-shaped, using the wheel. The preset in-feed depth of a grinding wheel is 0.05-20μm, and electrolytic in-process dressing is used. A grinding device whose loop rigidity is 150 N/μm or higher is used, and the material of a substrate is carbon. It is thus possible to increase the preset in-feed depth more than for a wheel without R for improved grinding efficiency.