| 摘要 |
<p>PROBLEM TO BE SOLVED: To surely measure an electric charge quantity even with fine carriers by constituting a part of a mesh part of the mesh part formed by irradiating a resin material with a laser. SOLUTION: This working method for the meshed part to be used for the device is executed by condensing a laser beam 31 and utilizing the mesh as a microspot or line. The laser beam is detected as a plane and the image of a mask 24 is projected to a working surface. The working size (opening diameter) is variable by the offset quantity, etc., from a magnification and focus and the opening of about 10 micrometer is easily formable. The opening is a fixed shape and the change of the opening shape by the movement of the constituting wire does not arise and, therefore, the change in the diameter of the material which may be transmitted is not admitted in spite of the repetition of the use and the result having reproducibility is obtainable. Then, the measuring instrument having the mesh part provided with the fine opening is relatively easily obtd. without subjecting the mesh part to intricate stages.</p> |
