ACTIVE MATRIX SUBSTRATE, ITS PRODUCTION AND LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain a liquid crystal display panel without burning in which an active matrix substrate with an MIM nonlinear elements is used, by electrically connecting a wiring film and the MIM nonlinear element with the same material as used for pixel electrodes. SOLUTION: A wiring film and an MIM nonlinear element are electrically connected with the same material as used for pixel electrodes, and moreover, the structure of the contact film from the wiring film to the pixel electrodes is made symmetric. For example, the MIM nonlinear element is formed to have a back-to-back structure of two elements connected in series with the opposite polarities to each other. In this MIM nonlinear optical element, a metal film 12 consists of a metal film which can be anodically oxidized such as tantalum, aluminum, titanium or an alloy film of these, and is formed as a part of the wiring film and the first metal film of the MIM nonlinear element. The second metal film 14 of the MIM nonlinear element consists of chromium, titanium, tantalum or an alloy of these. The ITO film 15 is formed as a part of the pixel electrode and the wiring film.