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发明名称
FORMING METHOD FOR SEMICONDUCTOR FILM AND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09219345(A)
申请公布日期
1997.08.19
申请号
JP19960025331
申请日期
1996.02.13
申请人
HITACHI CABLE LTD
发明人
WAJIMA MINEO
分类号
H01L21/20;H01L21/02;H01L43/14;(IPC1-7):H01L21/02
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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