| 摘要 |
<p>PROBLEM TO BE SOLVED: To manufacture a hard magnetic thin film which excels in rectangularity of magnetization curve even when the direction of the easy magnetization axis is isotropical and has high coercive force by performing heat treatment for an M/R-TM-B laminated film which has M on the R-TM-B hard magnetic thin film of a specific at% and crystallizing R2 TM14 B. SOLUTION: On a glass board, a protection film for M is formed. (The M is at least one of the following materials; Cr, Ti, W, Cu, Ta, FeMn, NiMn, NiO, FeO, CoO, CoPt, and Fe-Pt). On the protection film, an R-TM-B hard magnetic thin film composed of 10-20at% R (At least one of Nd and Pr or such material with a part substituted with Dy), 5-20at% B, and TM of the remaining percentage (Fe or Fe with a part substituted with Co). An M/R-TM-B/ M laminated film obtained by film forming by using M is heat-treated, and R2 TM14 M is crystallized. Thus, the oxidation of the R-TM-B film is suppressed and the high characteristic thin film is obtained.</p> |
