| 摘要 |
PROBLEM TO BE SOLVED: To facilitate the handling and conveyance of a very small object under a vacuum atmosphere by a method wherein gas is blown to the object put under the vacuum atmosphere through the leading edge of a pipe, which communicates with the outside of a vacuum container and has a very small hole, and the object is transferred by the wind pressure of the gas. SOLUTION: Nitrogen gas of a flow rate controlled by a variable leak value 16, which is fed from a nitrogen bomb 17, is blown off through a very small hole formed in a pipe 13 in a vacuum container 10 and a micro five-storied pagoda 11 is moved to a mesh-shaped cage 18, which is arranged by a robot hand 19, is bored with microscopic holes and is made of copper, and is housed in the cage 18. The object 11 is put in the cage 18 to transfer the object 11 to its distination by a transfer robot 19 and when the object 11 reaches the distination, the gas is again blown to the material 11 from under the cage 18 to transfer the object 11 to a sample board 20. Thereby, the handling and conveyance of the object 11 under a vacuum atmosphere can be facilitated. |
