Advanced manufacturing inspection system

摘要

An advanced manufacturing inspection system includes a database containing a rasterized reference image of the product inspected at the inspection resolution, allowing for accurate representation of shaped features. The full image is stored in the system database and is accessed and fed in a raster manner to an electronic registration subsystem which aligns the reference data to the incoming thresholded product inspection data. The aligned reference and inspection data are driven to all parallel defect detection channels. A classifier block selects the output of the desired channels for recording into a defect memory. Alternatively, the thresholding of the inspection gray scale signal is done after registration such that thresholding can be controlled by the reference data. The system is flexible in rendering abnormalities between reference and gray scale inspection images and functions independently of image resolution because the reference and inspection images are of the same resolution. The defects to be rendered are dependent upon that specified by the product designers and the process engineers. Each defect type to be found and rendered is processed by a separate channel whose output can be selected for entry into the defect memory.