ELECTROSTATIC CHUCK AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To improve reliability and durability and ensure uniformity of processing within a plane of a sample substrate, by working a groove in a form appropriate for achieving uniform in-plane temperature distribution for an electrostatic chuck. SOLUTION: In an electrostatic chuck 19 which is used by charging a gas between a sample substrate and a chuck main frame and is adapted for attracting a sample substrate 11 by an electrostatic force, a groove 22 having a depth not greater than an average free path under a charging pressure of the gas is worked on a surface of the chuck main frame which contacts the sample substrate. It is preferred that the depth of this groove 22 is not greater than 10μm and that the uniformity of depth is within an error range of±10%.