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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09219518(A)
申请公布日期
1997.08.19
申请号
JP19960325395
申请日期
1996.12.05
申请人
TOSHIBA CORP
发明人
TSUNODA TETSUJIRO;ITO TAKAHIRO;TAKASHITA MASAKATSU
分类号
G01R31/26;H01L21/66;H01L27/04;H01L29/739;H01L29/78;(IPC1-7):H01L29/78
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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