| 摘要 |
PROBLEM TO BE SOLVED: To efficiently fill a specified gas into a substrate chamber in which the substrate is arranged. SOLUTION: This device is provided to feed the specified gas into the substrate chamber 14 in which the substrate 10 for exposing is arranged, and to exhaust a part of the gaseous mixture of air and gas inside the substrate chamber 14. Thereafter, when the gas in the substrate chamber 14 reaches a specific density, a part of the gaseous mixture of air and gas is circulate inside the substrate chamber 14, and the gas of adequate density is filled into the substrate chamber 14. |
