发明名称 MODULAR DUMP VALVE ASSEMBLY IN A SEMICONDUCTOR BATH SYSTEM
摘要 <p>The present invention comprises a dump valve assembly to drain a tank. The dump valve assembly has a drain (11) at a bottom of the tank, a cap (20), a sealing plate (30) and an actuator (40). The drain has a flanged end (12). The cap has a base and a side, the side having an inward protrusion. The cap can be removed from the drain by simply disengaging the protrusion from the flange. The sealing plate contacts the end of the drain opening to seal the drain. The actuator drives the plate away from the cap base to place the plate surface against the drain end to close the dump valve assembly and drives the plate toward the cap base to remove the plate surface from the drain opening to open the dump valve assembly.</p>
申请公布号 WO1997029311(A1) 申请公布日期 1997.08.14
申请号 US1997001893 申请日期 1997.02.04
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址