发明名称 Materials testing apparatus for measuring tensile strength of very thin layers
摘要 The material test apparatus (1) has a pair of torsion bars (4), which act as the flexible holding part of the swivel lever (3). A frame (5) serves as the rigid holding part for the test specimen (2). The mechanical characteristics of which are measured, by the application of a single axis tensional force, achieved by applying a vertical load (W) at one end of a swivel lever. The specimen (2) is designed as a one piece unit with the frame (5) and the swivel lever (3). So that the values of the mechanical characteristics can be easily measured, without a direct contact with the test specimen (2).
申请公布号 DE19703271(A1) 申请公布日期 1997.08.14
申请号 DE19971003271 申请日期 1997.01.29
申请人 SEIKO INSTRUMENTS INC., CHIBA, JP;SATO, KAZUO, NAGOYA, AICHI, JP;SHIKIDA, MITSUHIRO, NAGOYA, AICHI, JP 发明人 SATO, KAZUO, NAGOYA, AICHI, JP;SHIKIDA, MITSUHIRO, NAGOYA, AICHI, JP
分类号 B81B3/00;B81C99/00;G01N3/00;G01N3/02;G01N3/08;G01N3/20;(IPC1-7):G01N3/14;H01L49/00 主分类号 B81B3/00
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