| 摘要 |
<p>A micropump (11) comprising at least two first wafer means (10, 12) defining a pump chamber (9), and a filter including liquid supply means, liquid collecting means, second wafer means (10) and silicon wafer means (12; 15), are disclosed. The second wafer means (10) and the silicon wafer means (12; 15) are arranged opposite one another and together define a cavity (13) for receiving a liquid, said cavity being sealed by at least one transverse partition (20; 20') that is shorter than the depth of the cavity (13) and divides it into an upstream portion and a downstream portion. Said silicon wafer means (12; 15) are at least partially sealingly attached to the second wafer means (10), the downstream portion of the cavity (13) communicates with said pump chamber (9), and the assembly comprising all the wafer means (10, 12) forms a sandwich structure.</p> |
