申请人 |
EBARA CORP., TOKIO/TOKYO, JP |
发明人 |
KOBAYASHI, MAKOTO, C/O EBARA RESEARCH CO., LTD, FUJISAWA-SHI, KANAGAWA-KEN, JP;YAMAMOTO, MASAKAZU, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP;MIYAKE, YOSHIO, C/O EBARA RESEARCH CO., LTD, FUJISAWA-SHI, KANAGAWA-KEN, JP;KIMURA, YOSHIKAZU, C/O EBARA RESEARCH CO., LTD., FUJISAWA-SHI, KANAGAWA-KEN, JP |