| 摘要 |
The equipment consists of the oscillating micromechanical plane mirror (1), a lightguiding moulding (2), a collimated light source (4), a photoreceiver (5), a controller (3) and a processor (6). The photoreceiver attached to one end of the moulding responds to any occultation by an object (7) moving through the beam. The mirror is preferably plane, suspended from springs coupled to opposite sides, and provided with electrodes for its oscillation about an axis. The moulding may be of transparent plastics or glass.
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| 申请人 |
CMS MIKROSYSTEME GMBH CHEMNITZ, 09577 NIEDERWIESA, DE |
发明人 |
RAUCH, MANFRED, DR.-ING., 09114 CHEMNITZ, DE;MARKERT, JOACHIM, DR.-ING., 09119 CHEMNITZ, DE;SCHMIDT, KARSTEN, 08523 PLAUEN, DE;HARTIG, CARSTEN, 08393 MEERANE, DE |
