| 摘要 |
<p>PURPOSE:To finely adjust the rotating position of a rotating minute stage by forming a floating body inside a base body through a thin wall section in a state where the floating body is united to the base body in one body and fitting an actuator to each of flexible sections on the front end side of the floating body. CONSTITUTION:This minute rotary stage 3 is constituted in such a way that the floating body 3 is rotated when the three actuators 4, 6, and 8 perform inching parrot movement which repeats expansion and contraction against each other. When the stage 3 is rotated clockwise, the actuator 4 contracts, resulting in the disengagement of a leg member 5 from a slip plate 10 or reduction of the pressing force of the member 5, and then the actuator 8 expands, resulting in the downward movement of the leg member 5. When the actuator 8 expands, the leg member 5 and another leg member 7 move downward by the expanding quantity of the actuator 8. Therefore, the rotational angle of the floating body 3 can be adjusted freely by setting the expanding or contracting quantity and number of cycles of the actuator 8 so that the floating body 3 can be rotated by a required rotational angle. Thus the fine rotating position adjustment can be performed.</p> |
