| 摘要 |
PURPOSE:To shorten a cycle time by an amount equivalent to a time in which a wafer is set on a carrier by providing loader parts in two trains. CONSTITUTION:Since a number of carriers 6 are set in a multiplex manner, the carriers do not occupy a large space, and a space can be saved. Further, loader parts B and B' are located in two trains. Thereby, by alternately using the loader parts B and B', a wafer W for subsequent processing can be preset on the carrier 6 by means of the one loader during a polishing work. A cycle time can be shortened by an amount equivalent to a time in which the wafer W is set on the carrier 6, and work efficiency can be improved. |
