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发明名称	PURAZUMASHORISOCHI
摘要
申请公布号	JP2641463(B2)	申请公布日期	1997.08.13
申请号	JP19870263891	申请日期	1987.10.21
申请人	HITACHI SEISAKUSHO KK	发明人	NAKATSUI FUJITSUGU;WATANABE SEIICHI;NAKAZATO NORIO;UEYAMA KEIJI
分类号	H01L21/31;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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