| 摘要 |
<p>PURPOSE:To obtain proper developability at the time of being developed in an aqueous alkaline developing solution containing organic matter, such as an organic solvent and/or a surfactant, by incorporating 2 kinds of specified structural units in a photocrosslinkable polymer compound. CONSTITUTION:The photocrosslinkable polymer compound has the 2 kinds of structural units represented by formulae l and ll in which each of R<1> and R<6> is H, methyl, or halogen; R<2> is a divalent hydrocarbon group; R<3> is a divalent hydrocarbon group optionally having an ether, ester, or amido bond; each of R<4> and R<5> is H, 1 - 4 C alkyl, or halogen; X is -O- or -NH-; Y is an ether, ester, or amido bond; and Z is absent, or a divalent bonding group composed of >= 2 of C, H, N, and O, thus permitting proper developability to be obtained at the time of developing after exposure with the aqueous alkaline developing solution containing containing organic matter, such as an organic solvent and/or a surfactant.</p> |
