发明名称 SEMICONDUCTOR DEVICE AND ITS PRODUCTION
摘要 PURPOSE:To obtain a semiconductor device free from disconnection and shortcircuiting by forming recessed grooves in an insulation substrate, making thin through-holes at their bottom face, matching and fixing element electrodes and through-holes and forming an electrode at the bottom surface.
申请公布号 JPS52135268(A) 申请公布日期 1977.11.12
申请号 JP19760052405 申请日期 1976.05.07
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 FUJIMOTO HIROAKI;IYORI MASAHARU;KITAHIRO ISAMU
分类号 H01L21/60;H01L21/58;H01L23/12 主分类号 H01L21/60
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