| 摘要 |
PURPOSE:To shorten the time for operation and to improve workability by forming the part of a reaction chamber where a by-product sticks into a cassette so that said part can be attached and detached at the time of forming a deposited film on a base body. CONSTITUTION:The cylindrical base body 2 to be formed with the deposited film is installed in the reaction chamber 1 and a cylindrical cassette 3 is attachably and detachably fixed to enclose the base body 2. The inside of the reaction chamber 1 is evacuated to a desired degree of vacuum and the base body 2 is heated to a prescribed temp. by a heater. A gaseous raw material is then introduced from an introducing part 8 into the reaction chamber. The gaseous raw material enters the inside of the reaction chamber 1 via an aperture 4 of the cassette 3 and at the same time, a high frequency is impressed to a high-frequency electrode 5 to generate plasma between said electrode and the base body 2. The deposited film is thereby formed on the surface of the base body 2 and at the same time, the by-product sticks on the inside surface of the cassette 3. The by-product is, therefore, removed extremely easily from the reaction chamber 1 simply by taking out the cassette 3 after the operation. |
