Procedure for the fabrication and the calibration of a nanometer length scale for technical equipment for the purpose of giving precise or ultraprecise images of structures
摘要
The method uses two different crystalline or non-crystalline materials (A, B) which have contrasting images clearly distinguishable from each another. These are formed into a heterogeneous series of layers carried on a substrate. The series is then subjected to experimental microscopic analysis from which the thickness and structure of each layer can be determined. This will form a scale in the nanometric range. The greater the number of layers, the more accurate the scale will be.
申请公布号
EP0789222(A2)
申请公布日期
1997.08.13
申请号
EP19960119153
申请日期
1996.11.29
申请人
DEUTSCHE TELEKOM AG
发明人
LOESCH, RAINER;HILLMER, HARTMUT, DR.;SCHLAPP, WINFRIED;POECKER, ARMIN;BETZ, WALTER;GOEBEL, RAINER, DR.