发明名称 Procedure for the fabrication and the calibration of a nanometer length scale for technical equipment for the purpose of giving precise or ultraprecise images of structures
摘要 The method uses two different crystalline or non-crystalline materials (A, B) which have contrasting images clearly distinguishable from each another. These are formed into a heterogeneous series of layers carried on a substrate. The series is then subjected to experimental microscopic analysis from which the thickness and structure of each layer can be determined. This will form a scale in the nanometric range. The greater the number of layers, the more accurate the scale will be.
申请公布号 EP0789222(A2) 申请公布日期 1997.08.13
申请号 EP19960119153 申请日期 1996.11.29
申请人 DEUTSCHE TELEKOM AG 发明人 LOESCH, RAINER;HILLMER, HARTMUT, DR.;SCHLAPP, WINFRIED;POECKER, ARMIN;BETZ, WALTER;GOEBEL, RAINER, DR.
分类号 G01B15/02 主分类号 G01B15/02
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