| 摘要 |
PROBLEM TO BE SOLVED: To ensure stabilized detection accuracy at high speed regardless of the rotation of pattern due to rotation of a surface to be inspected by providing an imaging optical system, an optical detection means, a rotary means, an image acquisition means and a defect detection means. SOLUTION: An object to be inspected, i.e., a coil 12, is carried on a conveyor 11 and set under an image pickup section 13. The image pickup section 13 delivers a signal to an image processing section 14. The coil 12 is positioned by a positioning unit 17 such that the optical axis of image pickup section 13 is aligned with the center of coil 12. Upon receiving a positioning completion signal from the unit 17, a main control system 15 delivers a control signal for capturing the image to the processing section 14. Image of the coil 12 illuminated by an illuminator is passed through an objective optical system, an image turning optical system and a condensing optical system and focused on a one- dimensional line CCD. |
