| 摘要 |
PROBLEM TO BE SOLVED: To sufficiently clean the surface of an article to be cleaned, such as an optical part, while maintaining a good appearance free from latent injuries, by heating pure water having a specific resistivity and subsequently immersing the article in the heated water. SOLUTION: This method for cleaning an article to be cleaned with pure water comprises setting the resistivity of the pure water to 0.5-5.0MΩ.cm, heating the pure water to 40-80 deg.C, immersing the article in the heated water, lifting the article and subsequently drying the cleaned article. The method can prevent ion residues from remaining on the surface of the article and latent injuries from increasing on the surface due to chemical attacks. The method for cleaning the article preferably comprises (a) a process for defatting (1, 2 tanks), (b) a process for replacing with an aqueous system (3, 4 tanks), (c) a process for finishing the cleaning (5, 6, 7 tanks), (d) a process for roughly rinsing the cleaned article (8, 8, 10 tanks), (e) a processing for finishing the rinsing (11 tank), (f) a process for immersing the rinsed article in warm pure water (12 tank), (g) a process for lifting the article (12 tank) and (h) a process for drying the article (13, 14, 15 tanks).
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