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发明名称
METHOD FOR REFINING RB2O AND PRODUCTION OF BRBO THIN FILM
摘要
申请公布号
JPH09208221(A)
申请公布日期
1997.08.12
申请号
JP19960046649
申请日期
1996.02.07
申请人
OKI ELECTRIC IND CO LTD
发明人
MAKITA TAKEHIKO
分类号
C01G1/00;C01D17/00;C01G29/00;C30B29/22;H01L21/203;H01L39/12;H01L39/24;(IPC1-7):C01D17/00
主分类号
C01G1/00
代理机构
代理人
主权项
地址
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