| 摘要 |
PROBLEM TO BE SOLVED: To prevent a top ring driving shaft and a dressing tool driving shaft from rusting by coating a wear and abrasion resistance resin material on an external surface near the lower end part of the top ring driving shaft where at least abrasive liquid adheres. SOLUTION: An air cylinder 52 is driven to lower an air cylinder 52 and a cylinder bracket 51 to a rod 53 fixed to a case 50, and a top ring driving shaft 30 and a top ring 11 are thereby lowered to bring a semiconductor wafer into press contact with a polishing cloth on a turn table for polishing the surface of the semiconductor wafer. In this case, the abrasive liquid supplied onto the turn table splashes around to also adhere to the top ring driving shaft 30, but since resin coating is carried out on the top ring driving shaft 30, there is no possibility of rusting. |
