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发明名称
ION BEAM SPUTTERING DEVICE
摘要
申请公布号
JPH09209142(A)
申请公布日期
1997.08.12
申请号
JP19960022687
申请日期
1996.02.08
申请人
JAPAN AVIATION ELECTRON IND LTD
发明人
HIRAYAMA TOMOJI
分类号
C23C14/46;H01L21/203;H01L21/31;(IPC1-7):C23C14/46
主分类号
C23C14/46
代理机构
代理人
主权项
地址
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