发明名称 |
Fremgangsmåte for fremstilling av en kalibrert lengdeskala i nanometerområdet for tekniske apparater, som tjener til höytopplösende henholdsvis ultrahöytopplösende avbildning av strukturer |
摘要 |
The method uses two different crystalline or non-crystalline materials (A, B) which have contrasting images clearly distinguishable from each another. These are formed into a heterogeneous series of layers carried on a substrate. The series is then subjected to experimental microscopic analysis from which the thickness and structure of each layer can be determined. This will form a scale in the nanometric range. The greater the number of layers, the more accurate the scale will be. |
申请公布号 |
NO970177(A) |
申请公布日期 |
1997.08.08 |
申请号 |
NO19970000177 |
申请日期 |
1997.01.15 |
申请人 |
DEUTSCHE TELEKOM AG |
发明人 |
LOESCH, RAINER;HILLMER, HARTMUT;SCHLAPP, WINFRIED;POECKER, ARMIN;BETZ, WALTER;GOEBEL, REINER |
分类号 |
G01B15/02;(IPC1-7):G01B21/02;H01L21/00;G01B9/04 |
主分类号 |
G01B15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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