| 摘要 |
A method and system (10) are provided including an optical head (12) which moves relative to an object (14) at a vison station to scan a projected pattern (36) of imageable electromagnetic radiation across the surface (18) of an object (14) to be inspected at a relatively constant linear rate to generate an imageable electromagnetic radiation signal. The optical head (12) includes at least one projector (38) which projects a grid of lines (36) and an imaging subsystem which includes a trilinear array camera (24) as a detector. The camera (24) and the at least one projector (38) are maintained in fixed relation to each other. Three linear detector elements (25) of the array camera (24) extend in a direction parallel with the grid of lines. The geometry of the optical head (12) is arranged in such a way that each linear detector element (25) picks up a different phase in the grid pattern. In another embodiment, the imageable electromagnetic radiation (36") is polarized and the response of the detector element (25") is polarization sensitive. The generated images are based on polarization for the surface (18").
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