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发明名称
Halbleitervorrichtung und Verfahren zu deren Einbrennen
摘要
申请公布号
DE69030283(T2)
申请公布日期
1997.08.07
申请号
DE1990630283T
申请日期
1990.06.29
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP
发明人
FURUYAMA, TOHRU, C/O INTELLECTUAL PROPERTY DIV., M
分类号
H01L21/66;G01R31/28;G11C11/401;G11C11/407;G11C29/00;G11C29/06;H01L21/768;H01L21/8242;H01L23/528;H01L27/108;(IPC1-7):H01L23/528;G06F11/24
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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