Semiconductor sensor for detecting physical parameter with mobile section of support structure

摘要

The support structure can shift in response to physical parameters exerted on it. On the substrate surface is fitted a fixed electrode and lies opposite to at least one section of the support structure. A laminated structure of an insulation film, a lower layer, a conductive film, and an insulation film of a top layer, is deposited on the substrate top section. The conductive film forms a wiring or an electrode formed over an aperture in the top layer insulation film and is coupled to an electric connector on the substrate top surface.