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发明名称
EIN VERFAHREN ZUR HERSTELLUNG SELBSTAUSRICHTENDER HALBLEITERANORDNUNGEN
摘要
申请公布号
DE3855889(T2)
申请公布日期
1997.08.07
申请号
DE19883855889T
申请日期
1988.12.02
申请人
ADVANCED MICRO DEVICES, INC., SUNNYVALE, CALIF., US
发明人
HASKELL, JACOB, D.
分类号
H01L21/3205;H01L21/28;H01L21/285;H01L21/336;H01L21/768;H01L21/8238;H01L23/522;H01L27/092;H01L29/43;H01L29/78;(IPC1-7):H01L21/28;H01L23/50
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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