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经营范围
发明名称
Electrode for use in a plasma assisted chemical etching process
摘要
申请公布号
EP0624897(B1)
申请公布日期
1997.08.06
申请号
EP19940303432
申请日期
1994.05.12
申请人
IPEC PRECISION, INC.
发明人
STEINBERG, GEORGE
分类号
H01L21/302;C23F4/00;H01J27/08;H01J37/08;H01J37/32;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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