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发明名称
HANDOTAISOCHINONYURYOKUHOGOSOCHI
摘要
申请公布号
JP2638571(B2)
申请公布日期
1997.08.06
申请号
JP19950155821
申请日期
1995.06.22
申请人
NIPPON DENKI KK
发明人
MIKI ATSUNORI
分类号
H01L21/822;H01L21/8234;H01L21/8238;H01L27/02;H01L27/04;H01L27/06;H01L27/088;H01L27/092;(IPC1-7):H01L27/04;H01L21/823
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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