发明名称 Method of fabricating junction-isolated semiconductor devices
摘要 <p>A method including the steps of: in a first buried region (4) of P-type, forming second buried regions (13) of N-type; growing, over the first (4) and second (13) buried regions, an N-type epitaxial layer (3b) defining a surface (10) of the device; forming, in the epitaxial layer, P-type isolation regions (6) extending from the surface (10) down to and in electric continuity with the first buried region (4) and defining, with the first buried region, N-type wells (5) incorporating the second buried regions; and forming P-type semiconducting regions (14) in the epitaxial layer (3b) and to the side of the isolation regions (6); the steps of forming isolation regions (6) and semiconducting regions (14) being performed in a single step of selectively introducing doping ions. &lt;IMAGE&gt; &lt;IMAGE&gt;</p>
申请公布号 EP0788151(A1) 申请公布日期 1997.08.06
申请号 EP19960830041 申请日期 1996.01.31
申请人 CONSORZIO PER LA RICERCA SULLA MICROELETTRONICA NEL MEZZOGIORNO 发明人 LEONARDI, SALVATORE
分类号 H01L21/76;H01L27/088;H01L21/761;H01L21/8222;H01L21/8234;H01L21/8248;H01L21/8249;H01L27/06;H01L29/78;(IPC1-7):H01L21/824 主分类号 H01L21/76
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