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发明名称
SICBUREEZUDOGATAKAISETSUKOSHINOSEIZOHOHO
摘要
申请公布号
JP2639297(B2)
申请公布日期
1997.08.06
申请号
JP19920355044
申请日期
1992.12.16
申请人
SHIMAZU SEISAKUSHO KK
发明人
KOEDA MASARU
分类号
G02B5/18;H01L21/302;H01L21/3065;(IPC1-7):G02B5/18
主分类号
G02B5/18
代理机构
代理人
主权项
地址
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