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发明名称
REIAUTOKENSHOSOCHI
摘要
申请公布号
JP2639147(B2)
申请公布日期
1997.08.06
申请号
JP19900002831
申请日期
1990.01.09
申请人
MITSUBISHI DENKI KK
发明人
IKEDA MINORU;MUNAKATA KONIN
分类号
H01L21/822;G06F17/50;H01L21/82;H01L27/04;(IPC1-7):G06F17/50
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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