| 摘要 |
PROBLEM TO BE SOLVED: To make a surface to be polished having the complicated difference of elevation uniformly flat, by providing many grinding wheel parts provided with parts buried in a resin sheet having flexibility and parts projecting from the front surface of the resin sheet, and arranged at the close distances. SOLUTION: Grinding wheel parts 7 projects from both front surfaces of a resin sheet 6 having flexibility. On the lower side of a polishing surface of a fine polishing tool, a wire 2 is arranged on a silicone wafer 1, there is a surface to be polished on which an oxide film 3 for covering the silicone wafer 1 and the wire 2 is formed, and the surface to be polished is so arranged as to face the polishing surface of the fine polishing tool. Polishing of the polishing surface and the surface to be polished is performed by moving the polishing surface and/or the surface to be polished while pressing the fine polishing tool from above with equal pressure by applying fluid pressure by an air bag. |
