LINEAR SOLID SWITCHING ELEMENT AND ITS PRODUCTION AS WELL AS PLANE DISPLAY ELEMENT FORMED BY USING THIS LINEAR SOLID SWITCHING ELEMENT AS PIXEL SELCTING MEANS

摘要

PROBLEM TO BE SOLVED: To provide a linear solid switching element which is simple in structure and easy in production and a process for producing the same as well as a large-sized active addressing type plane display element of high fineness formed by using this linear solid switching element as a pixel selecting means. SOLUTION: An insulating film 2, a-Si film 3, N(+)a-Si film 4, metallic film 5, etc., necessary for constituting the active switching element are formed on a fine wire 1 consisting of a metal. These multilayered films are worked to form a channel part, etc., by which the active switching element of the linear solid structure is formed. The linear solid-state switching element obtd. by forming the fine wire 1 (metallic wire) of the metal described above as a gate line and one piece of a wire (gate switching wire) from which the active switching element hangs down by one line at the gate bus line as one micromechanical part is used for the pixel selecting means of the plane display element.