发明名称 METHOD FOR STRIPPING AND CLEANING RESIST
摘要 PROBLEM TO BE SOLVED: To eliminate the need for enlarging an organic waste liquid treating tank even if the water in a water washing tank contains a large quantity of organic compound by mixing the waste water from the first water washing stage with a waste liquid of organic solvent and regenerating the mixture through distillation thereby increasing the stripping liquid to be recovered. SOLUTION: A work is subjected to stripping process twice using first and second stripping tanks 1a, 1b. Each stripping tank 1 employs an organic solvent exhibiting strong dissolution as a stripping liquid. Upon finishing immersion in the second stripping tank 1b, the work is immersed into water in a first water washing tank 2a. Excess water in the first water washing tank 2a is fed to a low pressure distillation tube 3. The first stripping tank la receives 100% stripping liquid along with the work and discharges 25% stripping liquid along with the work. Consequently, the low pressure distillation tube 3 receives 75% stripping liquid along with the work.
申请公布号 JPH09205056(A) 申请公布日期 1997.08.05
申请号 JP19960010605 申请日期 1996.01.25
申请人 HITACHI LTD 发明人 NISHIDA HIDEKI;TERAJIMA ETSUZO;NAKAMURA TAKAO
分类号 G03F7/42;H01L21/027;H01L21/304;(IPC1-7):H01L21/027 主分类号 G03F7/42
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