| 摘要 |
The structure of this invention involves a driving device for rotating a concave support, an input detection device for detecting a variation of electric current to a driving motor of the driving device, a rotation detection device for detecting the number of revolutions of the concave support, an operation display device for processing a signal from the rotation detection device on the basis of a conversion program to operate a moving amount of the concave support to store and display it, and a backpressure detection device for detecting a variation of backpressure of a static pressure type thrust bearing of a main shaft, the input detection device, the operation display device and the backpressure detection device are connected to a control device of the driving device.
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