PRODUCTION OF LIQUID JET RECORDING HEAD

摘要

PROBLEM TO BE SOLVED: To reduce the cost of groove processing by excimer laser. SOLUTION: A resin blank 10 is produced and groove processing is applied thereto by excimer laser L to form liquid passages. The excimer laser L is applied to the blank 10 through a mask 102 having pattern openings for the liquid passages and a projection optical system 103. Since the lens of the projections optical system 103 is locally damaged by the excimer laser L and the replacing number of times of the lens becomes many to increase the maintenance cost, the projection optical system 103 is rotated by a rotary driving device 104 to prevent the local damage of the lens to prolong the life thereof.