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发明名称
STATIC PREVENTION METHOD FOR SAMPLE IN ELECTRON BEAM LITHOGRAPHY SYSTEM
摘要
申请公布号
JPH09205050(A)
申请公布日期
1997.08.05
申请号
JP19960010221
申请日期
1996.01.24
申请人
TOSHIBA MACH CO LTD
发明人
SUZUKI YOSHIO
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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