FINE MOVEMENT DEVICE AND METHOD AND DEVICE FOR ION BEAM MACHINING,申请号JP19960010176-传众专利搜索

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发明名称	FINE MOVEMENT DEVICE AND METHOD AND DEVICE FOR ION BEAM MACHINING
摘要
申请公布号	JPH09201682(A)	申请公布日期	1997.08.05
申请号	JP19960010176	申请日期	1996.01.24
申请人	TOSHIBA CORP	发明人	MURAI SEIICHIRO
分类号	B23K15/00;(IPC1-7):B23K15/00	主分类号	B23K15/00
代理机构		代理人
主权项
地址

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