发明名称 |
Method of making two-terminal nonlinear device and liquid crystal apparatus including the same |
摘要 |
A two-terminal nonlinear device according to the present invention includes a lower electrode of a thin Ta film doped with nitrogen which is formed on a substrate, an anodized oxide film formed by anodizing a surface of the lower electrode, and an upper electrode of a metal thin film which is formed on the anodized oxide film, wherein the thin Ta film includes a structure in which first portions and second portions are alternately deposited, the first portions containing a different amount of nitrogen from that contained in the second portions.
|
申请公布号 |
US5654207(A) |
申请公布日期 |
1997.08.05 |
申请号 |
US19950409451 |
申请日期 |
1995.03.23 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
FUKUYAMA, TOSHIAKI;MATOBA, MASAKAZU;ISHIMOTO, YOSHIHISA;KISHIDA, MASAHIRO;YOSHIMIZU, TOSHIYUKI;SEIKE, TAKESHI |
分类号 |
H01L45/00;(IPC1-7):H01L21/285;H01L21/84 |
主分类号 |
H01L45/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|